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山东省淄博市淄川新材料园(光电园区)
  • 产品名称: 全氟丁二烯 Perfluorobutadiene
  • 产品编号: 05003
  • 上架时间: 2017-02-24
  • 浏览次数: 783

    全氟丁二烯(C4F6)是一种无色无味且不溶于水的气体。常温常压下,全氟丁二烯熔点为-132.0℃沸点为5.9℃。全氟丁二烯是一种含有六个氟原子和两个碳碳双键的共轭烯烃,作为一种优异的蚀刻气体由于其独特的F/C,与传统使用的全氟饱和氟碳类蚀刻气体相比,全氟丁二烯具有更高的蚀刻选择性、精确性和纵横比,可以蚀刻小于100nm 甚至更窄的电子线路。此外,C4F6C4F8具有更高的对光阻和氮化硅选择比,在使用时可以提高蚀刻的稳定性,提高蚀刻速率和均匀度,从而提高产品优良率。

 

项目

单位

指标

C4F6

Vol.%

99.999

N2

Vol.ppm

0.5

O2+Ar

Vol.ppm

0.1

H2O

Vol.ppm

0.2

CO2

Vol.ppm

0.4

CO

Vol.ppm

0.1

异丙醇

Vol.ppm

0.2

其他氟碳化合物

Vol.ppm

7

酸度HF

Wt.ppm

0.1

 

 

 

 

 

 

 

 

 

 

      作为刻蚀气用于半导体产品的等离子介质刻蚀。

      全氟丁二烯充装在碳钢钢瓶中,钢瓶型号为B10,尺寸14cm×83cm,内部容积10.1L,毛重14.7kg,有效载荷10kg具体包装规格可根据用户要求定制更改。


Perfluorobutadiene (C4F6) is a kind of colorless, odorless, and water insoluble gas. At normal temperature and pressure, its melting point is 132.0 ℃, boiling point is 5.9 ℃. Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.

 

Items

Unit

Index

C4F6

Vol.%

≥99.999

N2

Vol.ppm

≤0.5

O2Ar

Vol.ppm

≤0.1

H2O

Vol.ppm

≤0.2

CO2

Vol.ppm

≤0.4

CO

Vol.ppm

≤0.1

Isopropanol

Vol.ppm

≤0.2

Other fluorocarbon

Vol.ppm

≤7

AcidityMeasured by HF

Wt.ppm

≤0.1

 

 

 

 

 

 

 

 

 

 

 

 

       Used as etching gas for plasma etching of semiconductor products.

Perfluorobutadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.