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山东省淄博市淄川新材料园(光电园区)
  • 产品名称: 八氟丙烷 Octafluoropropane
  • 产品编号: 05002
  • 上架时间: 2017-02-24
  • 浏览次数: 447

     八氟丙烷(C3F8)是一种无色、无味、不可燃的惰性气体。常温常压下,八氟丙烷熔点为-183.0℃,沸点为-36.7℃,难溶于水。电子级高纯八氟丙烷应用在半导体器件制造过程中,与氧气的混合气用作等离子蚀刻气体。

 

项目

单位

指标

C3F8

Vol.%

99.999

99.9995

O2+Ar

Vol.ppm

1

0.5

N2

Vol.ppm

5

1

CO

Vol.ppm

0.5

0.5

CO2

Vol.ppm

0.5

0.5

CF4

Vol.ppm

0.5

0.5

C2F6

Vol.ppm

0.5

0.5

CH4

Vol.ppm

1

1

H2O

Vol.ppm

1

1

酸度(以HF计)

Wt. ppm

0.1

0.1

总杂质含量

Mol.ppm

10

5

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

       在半导体工业中,用作等离子蚀刻材料;在医学中,八氟丙烷可用于玻璃体视网膜手术后填充物及超声造影剂;八氟丙烷也可用于制作制冷混合物。

      八氟丙烷充装在经特殊处理的洁净、干燥的无缝高压气瓶中,气瓶容积分别为4L、8L10L12.5L、40L等。具体包装规格可根据用户需求定制更改。           


Octafluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. At normal temperature and pressure, its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Octafluoropropane is produced by the reaction of heptafluoropropane and fluorine gas, then obtained electronic grade products after purification and rectification. Electronic grade octafluoropropane is used in semiconductor materials and semiconductor device manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer. In addition, because of its high physiological resistance, it is mainly used as a filler and contrast agent after vitreoretinal surgery.

 

Items

Unit

Index

C3F8

Vol.%

≥99.999

≥99.9995

O2+Ar

Vol.ppm

<1

<0.5

N2

Vol.ppm

<5

<1

CO

Vol.ppm

<0.5

<0.5

CO2

Vol.ppm

<0.5

<0.5

CF4

Vol.ppm

<0.5

<0.5

C2F6

Vol.ppm

<0.5

<0.5

CH4

Vol.ppm

<1

<1

H2O

Vol.ppm

<1

<1

Acidity (Mesured by HF)

Wt. ppm

<0.1

<0.1

Total impurity content

Mol.ppm

≤10

≤5

 

      In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.

      Octafluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.