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山东省淄博市淄川新材料园(光电园区)
  • 产品名称: 六氟乙烷 Hexafluoroethane
  • 产品编号: 05001
  • 上架时间: 2017-02-24
  • 浏览次数: 588

    六氟乙烷(C2F6),又称全氟乙烷,是一种无色、无味、不可燃的惰性气体。常温常压下,六氟乙烷熔点为-100.6℃,沸点为-78.2℃,微溶于水。六氟乙烷作为干腐蚀剂具有边缘侧向侵蚀现象极微、高蚀刻率及高精确性的优点,可以极好地满足线宽较小的制程要求,被广泛应用于半导体制作过程中。

 

项目

单位

指标

C2F6

Vol.%

≥99.999

O2+Ar

Vol.ppm

<1

N2

Vol.ppm

<5

CO

Vol.ppm

<0.5

CO2

Vol.ppm

<0.5

H2

Vol.ppm

<0.5

卤代烃

Vol.ppm

<5

CH4

Vol.ppm

<1

H2O

Vol.ppm

<2

酸度(以HF计)

Wt. ppm

<0.1

总杂质含量

Mol.ppm

≤10

 

 

 

 

 

 

 

 

 

 

 

 

 

 

    电子级高纯六氟乙烷主要在半导体器件制造过程中,作为蚀刻剂、化学气相沉积(CVD)后的腔体清洗剂等使用,同时也可作为高介电强度制冷和电气设备的气体绝缘介质使用。

        六氟乙烷充装在耐高压钢瓶中,钢瓶装配黄铜阀门,阀门配套接头为压缩气体协会(CGA)的320型可替换标准接头。具体包装规格可根据客户需求定制更改。


      Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. At normal temperature and pressure, its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Hexafluoroethane is produced by the reaction of R125 and fluorine gas, then obtained electronic grade products after purification and rectification. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.

 

Items

Unit

Index

C2F6

Vol.%

≥99.999

O2+Ar

Vol.ppm

<1

N2

Vol.ppm

<5

CO

Vol.ppm

<0.5

CO2

Vol.ppm

<0.5

H2

Vol.ppm

<0.5

Halohydrocarbon

Vol.ppm

<5

CH4

Vol.ppm

<1

H2O

Vol.ppm

<2

Acidity(Measured by HF)

Wt. ppm

<0.1

Total impurity content

Mol.ppm

≤10

 

      Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.

      Hexafluoroethane is filled in high pressure resistant cylinders that is fitted with brass valves with a matching joint for the CGA type 320 replaceable standard fittings. Packaging specifications can be customized according to customers' requirements.